Book/Dissertation / PhD Thesis FZJ-2023-01723

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png
HAXPES study of interface and bulk chemistry of ferroelectric HfO2 capacitors



2023
Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag Jülich
ISBN: 978-3-95806-692-2

Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Schriften des Forschungszentrums Jülich Reihe Information / Information 94, viii, 120 () [10.34734/FZJ-2023-01723] = Dissertation, Univ. Konstanz, 2022

This record in other databases:

Please use a persistent id in citations: doi:

Abstract: HfO2 is the first known ferroelectric material formed from only two elements. The discovery of the ferroelectric properties took place in 2011 in Si-doped HfO2 thin films. This stimulated widespread investigations on the fundamentals and origin of the ferroelectric properties in HfO2 based materials and the exploration of potential applications in the semiconductor industry. The orthorhombic crystal structure in HfO2 has been identified as the ferroelectric phase. This work takes place in the framework of the EU project 3ǫFERRO, which aims to design HfO2 based nonvolatile memory. Here, HfO2 has the role of a dielectric enclosed by two electrodes in a capacitor structure. To achieve the project goals, application-oriented fundamental research is needed to produce optimization options for the ferroelectric materials and interfaces to the electrodes.


Note: Dissertation, Univ. Konstanz, 2022

Contributing Institute(s):
  1. Elektronische Eigenschaften (PGI-6)
Research Program(s):
  1. 5211 - Topological Matter (POF4-521) (POF4-521)

Appears in the scientific report 2023
Database coverage:
Creative Commons Attribution CC BY 4.0 ; OpenAccess
Click to display QR Code for this record

The record appears in these collections:
Document types > Theses > Ph.D. Theses
Institute Collections > PGI > PGI-6
Document types > Books > Books
Workflow collections > Public records
Publications database
Open Access

 Record created 2023-04-05, last modified 2023-07-07


OpenAccess:
Download fulltext PDF
Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)